Uvarov Ilia V.
Latest issues
- 2024, Volume 17 Issue 3
- 2024, Volume 17 Issue 2
- 2024, Volume 17 Issue 1.1
- 2024, Volume 17 Issue 1 Full text
Performance optimization of the cantilever-based MEMS switch
- Year: 2022
- Volume: 15
- Issue: 3.2
- 28
- 2545
- Pages: 140-144
Ruthenium as an electrode material for the fast electrochemical actuator
- Year: 2022
- Volume: 15
- Issue: 3.2
- 12
- 2587
- Pages: 280-284
A seesaw-type MEMS switch with Pt and Ru contacts
- Year: 2022
- Volume: 15
- Issue: 3.3
- 17
- 2393
- Pages: 335-339
Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane
- Year: 2022
- Volume: 15
- Issue: 3.3
- 16
- 2509
- Pages: 376-380
Testing the fast electrochemical micropump with PDMS membrane
- Year: 2023
- Volume: 16
- Issue: 3.1
- 4
- 1293
- Pages: 423-427
A cantilever type MEMS switch with enhanced contact force: the first results
- Year: 2023
- Volume: 16
- Issue: 3.1
- 15
- 1425
- Pages: 428-433
Modeling of a capacitive MEMS switch with “floating” electrode
- Year: 2023
- Volume: 16
- Issue: 3.1
- 15
- 1554
- Pages: 454-458