Uvarov Ilia V.

Performance optimization of the cantilever-based MEMS switch

Physical electronics
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 28
  • 2676
  • Pages: 140-144

Ruthenium as an electrode material for the fast electrochemical actuator

Physical materials technology
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 12
  • 2727
  • Pages: 280-284

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 17
  • 2534
  • Pages: 335-339

Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane

Experimental technique and devices
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 16
  • 2636
  • Pages: 376-380

Testing the fast electrochemical micropump with PDMS membrane

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 1421
  • Pages: 423-427

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1583
  • Pages: 428-433

Modeling of a capacitive MEMS switch with “floating” electrode

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1695
  • Pages: 454-458

A compact MEMS switch for advanced radar systems

Physical electronics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 0
  • 109
  • Pages: 178-181

Combined resistive-capacitive MEMS switch for advanced communication systems

Physical electronics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 1
  • 109
  • Pages: 186-190

A fast and strong microactuator powered by explosion of a hydrogen-oxygen mixture

Mechanics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 1
  • 85
  • Pages: 340-344