SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Uvarov Ilia V.
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Latest issues
Uvarov Ilia V.

Performance optimization of the cantilever-based MEMS switch

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 28
  • 2565
  • Pages: 140-144

Ruthenium as an electrode material for the fast electrochemical actuator

Physical materials technology
Shlepakov P.S. Uvarov I.V. Svetovoy V.B.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 12
  • 2608
  • Pages: 280-284

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
Uvarov I.V. Naumov V.V. Kupriyanov A.N. Izyumov M.O. Amirov I.I.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 17
  • 2419
  • Pages: 335-339

Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane

Experimental technique and devices
Uvarov I.V. Shlepakov P.S. Abramychev A.A. Svetovoy V.B.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 16
  • 2528
  • Pages: 376-380

Testing the fast electrochemical micropump with PDMS membrane

Physical electronics
Shlepakov P.S. Uvarov I.V. Abramychev A.A. Svetovoy V.B.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 1317
  • Pages: 423-427

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1450
  • Pages: 428-433

Modeling of a capacitive MEMS switch with “floating” electrode

Physical electronics
Morozov M.O. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1580
  • Pages: 454-458