Uvarov Ilia V.

Performance optimization of the cantilever-based MEMS switch

Physical electronics
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 31
  • 3377
  • Pages: 140-144

Ruthenium as an electrode material for the fast electrochemical actuator

Physical materials technology
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 13
  • 3434
  • Pages: 280-284

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 19
  • 3255
  • Pages: 335-339

Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane

Experimental technique and devices
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 17
  • 3309
  • Pages: 376-380

Testing the fast electrochemical micropump with PDMS membrane

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 2122
  • Pages: 423-427

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 19
  • 2417
  • Pages: 428-433

Modeling of a capacitive MEMS switch with “floating” electrode

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 22
  • 2397
  • Pages: 454-458

A compact MEMS switch for advanced radar systems

Physical electronics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 7
  • 861
  • Pages: 178-181

Combined resistive-capacitive MEMS switch for advanced communication systems

Physical electronics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 6
  • 851
  • Pages: 186-190

A fast and strong microactuator powered by explosion of a hydrogen-oxygen mixture

Mechanics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 6
  • 911
  • Pages: 340-344

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