SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Ilia V. Uvarov
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Latest issues
Ilia V. Uvarov
Ilia V. Uvarov

Performance optimization of the cantilever-based MEMS switch

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 33
  • 4784
  • Pages: 140-144

Ruthenium as an electrode material for the fast electrochemical actuator

Physical materials technology
Shlepakov P.S. Uvarov I.V. Svetovoy V.B.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 14
  • 4768
  • Pages: 280-284

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
Uvarov I.V. Naumov V.V. Kupriyanov A.N. Izyumov M.O. Amirov I.I.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 19
  • 4409
  • Pages: 335-339

Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane

Experimental technique and devices
Uvarov I.V. Shlepakov P.S. Abramychev A.A. Svetovoy V.B.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 18
  • 4651
  • Pages: 376-380

Testing the fast electrochemical micropump with PDMS membrane

Physical electronics
Shlepakov P.S. Uvarov I.V. Abramychev A.A. Svetovoy V.B.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 3366
  • Pages: 423-427

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 22
  • 3668
  • Pages: 428-433

Modeling of a capacitive MEMS switch with «floating» electrode

Physical electronics
Morozov M.O. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 25
  • 3719
  • Pages: 454-458

A compact MEMS switch for advanced radar systems

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 11
  • 2194
  • Pages: 178-181

Combined resistive-capacitive MEMS switch for advanced communication systems

Physical electronics
Morozov M.O. Uvarov I.V.
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 11
  • 2209
  • Pages: 186-190

A fast and strong microactuator powered by explosion of a hydrogen-oxygen mixture

Mechanics
Shlepakov P.S. Uvarov I.V. Svetovoy V.B.
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 9
  • 2153
  • Pages: 340-344