SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal - Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Morozov Matvey O.
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Morozov Matvey O.
  • Affiliation
    Federal State Budgetary Institution of Science K.A. Valiev Institute of Physics and Technology of the RAS Yaroslavl Branch
  • Yaroslavl, Russian Federation
  • Publications

Modeling of a capacitive MEMS switch with “floating” electrode

Physical electronics
Morozov M.O. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 10
  • 634
  • Pages: 454-458