SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorIlia V. Uvarov
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    Latest issues
    Ilia V. Uvarov
    Ilia V. Uvarov

    Performance optimization of the cantilever-based MEMS switch

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2022
    • Volume: 15
    • Issue: 3.2
    • 34
    • 6431
    • Pages: 140-144

    Ruthenium as an electrode material for the fast electrochemical actuator

    Physical materials technology
    Shlepakov P.S.Uvarov I.V.Svetovoy V.B.
    • Year: 2022
    • Volume: 15
    • Issue: 3.2
    • 15
    • 6416
    • Pages: 280-284

    A seesaw-type MEMS switch with Pt and Ru contacts

    Radiophysics
    Uvarov I.V.Naumov V.V.Kupriyanov A.N.Izyumov M.O.Amirov I.I.
    • Year: 2022
    • Volume: 15
    • Issue: 3.3
    • 20
    • 6053
    • Pages: 335-339

    Fabrication of a micropump based on the fast electrochemical actuator with the PDMS membrane

    Experimental technique and devices
    Uvarov I.V.Shlepakov P.S.Abramychev A.A.Svetovoy V.B.
    • Year: 2022
    • Volume: 15
    • Issue: 3.3
    • 18
    • 6277
    • Pages: 376-380

    Testing the fast electrochemical micropump with PDMS membrane

    Physical electronics
    Shlepakov P.S.Uvarov I.V.Abramychev A.A.Svetovoy V.B.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 8
    • 5057
    • Pages: 423-427

    A cantilever type MEMS switch with enhanced contact force: the first results

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 23
    • 5341
    • Pages: 428-433

    Modeling of a capacitive MEMS switch with «floating» electrode

    Physical electronics
    Morozov M.O.Uvarov I.V.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 30
    • 5494
    • Pages: 454-458

    A compact MEMS switch for advanced radar systems

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 14
    • 3933
    • Pages: 178-181

    Combined resistive-capacitive MEMS switch for advanced communication systems

    Physical electronics
    Morozov M.O.Uvarov I.V.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 15
    • 3918
    • Pages: 186-190

    A fast and strong microactuator powered by explosion of a hydrogen-oxygen mixture

    Mechanics
    Shlepakov P.S.Uvarov I.V.Svetovoy V.B.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 18
    • 3940
    • Pages: 340-344

    MEMS switch with an intermediate electrode for high-speed communication networks

    Physical electronics
    Morozov M.O.Uvarov I.V.
    • Year: 2025
    • Volume: 18
    • Issue: 3.1
    • 9
    • 1602
    • Pages: 178-181

    A compact MEMS switch based on a cantilever with three elastic elements

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2025
    • Volume: 18
    • Issue: 3.2
    • 7
    • 1445
    • Pages: 168-171