A cantilever type MEMS switch with enhanced contact force: the first results

MEMS switches are of particular interest for advanced radio electronic systems, but their application is limited by the lack of reliability. The switch develops low contact force, which leads to high and unstable contact resistance. The force is typically increased by using complex shaped and large area electrodes, while a simple and compact design is more preferable. This work presents a switch based on a miniature cantilever. The contact force is enhanced by selecting the vertical dimensions of the structure. The trial samples are fabricated and tested. Their performance is compared with theoretical predictions.