SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
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    Articles by keywords "MEMS switch"

    A compact MEMS switch based on a cantilever with three elastic elements

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2025
    • Volume: 18
    • Issue: 3.2
    • 5
    • 591
    • Pages: 168-171

    MEMS switch with an intermediate electrode for high-speed communication networks

    Physical electronics
    Morozov M.O.Uvarov I.V.
    • Year: 2025
    • Volume: 18
    • Issue: 3.1
    • 3
    • 662
    • Pages: 178-181

    Combined resistive-capacitive MEMS switch for advanced communication systems

    Physical electronics
    Morozov M.O.Uvarov I.V.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 12
    • 3038
    • Pages: 186-190

    A compact MEMS switch for advanced radar systems

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 11
    • 3122
    • Pages: 178-181

    Modeling of a capacitive MEMS switch with “floating” electrode

    Physical electronics
    Morozov M.O.Uvarov I.V.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 28
    • 4602
    • Pages: 454-458

    A cantilever type MEMS switch with enhanced contact force: the first results

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 22
    • 4552
    • Pages: 428-433

    A seesaw-type MEMS switch with Pt and Ru contacts

    Radiophysics
    Uvarov I.V.Naumov V.V.Kupriyanov A.N.Izyumov M.O.Amirov I.I.
    • Year: 2022
    • Volume: 15
    • Issue: 3.3
    • 20
    • 5196
    • Pages: 335-339

    Performance optimization of the cantilever-based MEMS switch

    Physical electronics
    Belozerov I.A.Uvarov I.V.
    • Year: 2022
    • Volume: 15
    • Issue: 3.2
    • 33
    • 5589
    • Pages: 140-144
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