Articles by keywords "MEMS switch"
Modeling of a capacitive MEMS switch with “floating” electrode
- Year: 2023
- Volume: 16
- Issue: 3.1
- 10
- 596
- Pages: 454-458
A cantilever type MEMS switch with enhanced contact force: the first results
- Year: 2023
- Volume: 16
- Issue: 3.1
- 11
- 544
- Pages: 428-433
A seesaw-type MEMS switch with Pt and Ru contacts
- Year: 2022
- Volume: 15
- Issue: 3.3
- 15
- 1573
- Pages: 335-339
Performance optimization of the cantilever-based MEMS switch
- Year: 2022
- Volume: 15
- Issue: 3.2
- 23
- 1758
- Pages: 140-144