Performance optimization of the cantilever-based MEMS switch

Microelectromechanical system (MEMS) switches combine advantages of electromagnetic and semiconductor relays. However, a number of problems prevent the widespread use of these devices. One of them is high actuation voltage. In this work, voltage reduction is achieved by optimizing the shape of the electrodes. The switch is simulated by the finite element method. Dependences of the actuation voltage on the geometric parameters are obtained.
The proposed shape of the electrodes reduces the voltage by almost two times compared to conventional design without deterioration of other working characteristics.