SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
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    Articles by keywords "atomic layer deposition"

    Structural and optical properties of InP layers obtained by plasma-enhanced atomic layer deposition at different temperatures

    Physical materials technology
    Uvarov A.V.Baranov A.I.Maksimova A.A.Vyacheslavova E.A.Pozdeev V.A.Mikhaylov O.P.Nikitina E.V.Gudovskikh A.S.
    • Year: 2025
    • Volume: 18
    • Issue: 3.1
    • 8
    • 1308
    • Pages: 247-251

    Influence of in-situ plasma treatment during PE-ALD of GaN on growth rate and morphology

    Physics of molecules, clusters and nanostructures
    Maksimova A.A.Uvarov A.V.Vyacheslavova E.A.Baranov A.I.Yarchuk E.YGudovskikh A.S.
    • Year: 2024
    • Volume: 17
    • Issue: 3.2
    • 20
    • 3205
    • Pages: 152-156

    Properties of ultrathin epitaxial NbNx film on C-cut sapphire

    Condensed matter physics
    Shibalov M.V.Sirotina A.P.Pershina E.A.Shibalova A.A.Mumlyakov A.M.Porokhov N.V.Tarkhov M.A.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 12
    • 5247
    • Pages: 69-73

    Study of composite structure based on Ag and SiNWs

    Quantum wires, quantum dots, and other low-dimensional systems
    Bolshakov V.O.Ermina A.A.Prigoda K.V.Maximov M.Yu.Tolmachev V.A.Zharova Yu.A.
    • Year: 2023
    • Volume: 16
    • Issue: 1.3
    • 24
    • 5370
    • Pages: 128-134

    Decorative protective coatings produced by atomic layer deposition and calculation of their spectral characteristics

    Physical optics
    Aksenova V.V.Mesh M.V.Kolokolov D.S.Kartseva T.Yu.Fedorov N.A.Pavluchenko A.S.
    • Year: 2023
    • Volume: 16
    • Issue: 1.2
    • 27
    • 5513
    • Pages: 165-171

    Wettability of transparent conductive nanostructured ITO and ITO/Al2O3 coatings

    Atom physics and physics of clusters and nanostructures
    Aksenova V.V.Smirnova I.P.Markov L.K.Pavluchenko A.S.Kolokolov D.S.Volkov D.Yu.
    • Year: 2023
    • Volume: 16
    • Issue: 1.1
    • 35
    • 5863
    • Pages: 404-410

    Plasma deposited indium phosphide and its electrophysical properties

    Physical electronics
    Maksimova A.A.Uvarov A.V.Kirilenko D.A.Baranov A.I.Vyacheslavova E.A.Gudovskikh A.S.
    • Year: 2022
    • Volume: 15
    • Issue: 3.3
    • 45
    • 7117
    • Pages: 123-127