SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorAnastasia A. Shibalova
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    Latest issues
    Anastasia A. Shibalova
    Anastasia A. Shibalova
    Affiliation
    Institute of Nanotechnologies of Microelectronics of the RAS
    Moscow, Russian Federation

    Properties of ultrathin epitaxial NbNx film on C-cut sapphire

    Condensed matter physics
    Shibalov M.V.Sirotina A.P.Pershina E.A.Shibalova A.A.Mumlyakov A.M.Porokhov N.V.Tarkhov M.A.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 11
    • 5053
    • Pages: 69-73

    Study of n-diamond and carbon nanowalls structure synthsized by the RF-PECVD

    Physical materials technology
    Mumlyakov A.M.Pershina E.A.Shibalova A.A.Shibalov M.V.Anufriev Yu.V.Filippov I.A.Sen’ V.Tarkhov M.A.
    • Year: 2023
    • Volume: 16
    • Issue: 3.2
    • 20
    • 5239
    • Pages: 211-216