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Maksim V. Shibalov
Affiliation
Institute of Nanotechnologies of Microelectronics of the RAS
Moscow, Russian Federation
Properties of ultrathin epitaxial NbNx film on C-cut sapphire
- Year: 2023
- Volume: 16
- Issue: 3.1
- 10
- 4732
- Pages: 69-73
Modelling the influence of planar waveguide cladding thickness on the absorption efficiency of a superconducting NbN strip
- Year: 2023
- Volume: 16
- Issue: 3.2
- 14
- 4444
- Pages: 87-91
Study of n-diamond and carbon nanowalls structure synthsized by the RF-PECVD
- Year: 2023
- Volume: 16
- Issue: 3.2
- 19
- 4836
- Pages: 211-216

