SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorAnna P. Sirotina
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    Anna P. Sirotina
    Anna P. Sirotina
    Affiliation
    Institute of Nanotechnologies of Microelectronics of the RAS
    Moscow, Russian Federation

    Properties of ultrathin epitaxial NbNx film on C-cut sapphire

    Condensed matter physics
    Shibalov M.V.Sirotina A.P.Pershina E.A.Shibalova A.A.Mumlyakov A.M.Porokhov N.V.Tarkhov M.A.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 10
    • 4721
    • Pages: 69-73