SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Author Anna P. Sirotina
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Anna P. Sirotina
Anna P. Sirotina
Affiliation
Institute of Nanotechnologies of Microelectronics of the RAS
Moscow, Russian Federation

Properties of ultrathin epitaxial NbNx film on C-cut sapphire

Condensed matter physics
Shibalov M.V. Sirotina A.P. Pershina E.A. Shibalova A.A. Mumlyakov A.M. Porokhov N.V. Tarkhov M.A.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 7
  • 4493
  • Pages: 69-73