SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "contact resistance"

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1425
  • Pages: 428-433

Formation of ohmic contacts to n-AlxGa1-xN:Si layers with a high aluminum content

Novel materials
Semenov A. Nechaev D. Berezina D. Guseva Yu.A. Kulagina M.M. Smirnova I.P. Zadiranov Y. M. Troshkov S. Shmidt N.P.
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 16
  • 1890
  • Pages: 182-187

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
Uvarov I.V. Naumov V.V. Kupriyanov A.N. Izyumov M.O. Amirov I.I.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 17
  • 2395
  • Pages: 335-339