Articles by keywords "atomic layer deposition"

Influence of in-situ plasma treatment during PE-ALD of GaN on growth rate and morphology

Physics of molecules, clusters and nanostructures
  • Year: 2024
  • Volume: 17
  • Issue: 3.2
  • 2
  • 318
  • Pages: 152-156

Properties of ultrathin epitaxial NbNx film on C-cut sapphire

Condensed matter physics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 2016
  • Pages: 69-73

Study of composite structure based on Ag and SiNWs

Quantum wires, quantum dots, and other low-dimensional systems
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 17
  • 2611
  • Pages: 128-134

Decorative protective coatings produced by atomic layer deposition and calculation of their spectral characteristics

Physical optics
  • Year: 2023
  • Volume: 16
  • Issue: 1.2
  • 16
  • 2377
  • Pages: 165-171

Wettability of transparent conductive nanostructured ITO and ITO/Al2O3 coatings

Atom physics and physics of clusters and nanostructures
  • Year: 2023
  • Volume: 16
  • Issue: 1.1
  • 20
  • 2588
  • Pages: 404-410

Plasma deposited indium phosphide and its electrophysical properties

Physical electronics
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 26
  • 3428
  • Pages: 123-127

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