Articles by keywords "atomic layer deposition"
Influence of in-situ plasma treatment during PE-ALD of GaN on growth rate and morphology
- Year: 2024
- Volume: 17
- Issue: 3.2
- 7
- 1042
- Pages: 152-156
Properties of ultrathin epitaxial NbNx film on C-cut sapphire
- Year: 2023
- Volume: 16
- Issue: 3.1
- 7
- 2761
- Pages: 69-73
Study of composite structure based on Ag and SiNWs
- Year: 2023
- Volume: 16
- Issue: 1.3
- 20
- 3359
- Pages: 128-134
Decorative protective coatings produced by atomic layer deposition and calculation of their spectral characteristics
- Year: 2023
- Volume: 16
- Issue: 1.2
- 21
- 3148
- Pages: 165-171
Wettability of transparent conductive nanostructured ITO and ITO/Al2O3 coatings
- Year: 2023
- Volume: 16
- Issue: 1.1
- 23
- 3449
- Pages: 404-410
Plasma deposited indium phosphide and its electrophysical properties
- Year: 2022
- Volume: 15
- Issue: 3.3
- 32
- 4354
- Pages: 123-127