SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "atomic layer deposition"

Structural and optical properties of InP layers obtained by plasma-enhanced atomic layer deposition at different temperatures

Physical materials technology
Uvarov A.V. Baranov A.I. Maksimova A.A. Vyacheslavova E.A. Pozdeev V.A. Mikhaylov O.P. Nikitina E.V. Gudovskikh A.S.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 2
  • 315
  • Pages: 247-251

Influence of in-situ plasma treatment during PE-ALD of GaN on growth rate and morphology

Physics of molecules, clusters and nanostructures
Maksimova A.A. Uvarov A.V. Vyacheslavova E.A. Baranov A.I. Yarchuk E.Y Gudovskikh A.S.
  • Year: 2024
  • Volume: 17
  • Issue: 3.2
  • 14
  • 2292
  • Pages: 152-156

Properties of ultrathin epitaxial NbNx film on C-cut sapphire

Condensed matter physics
Shibalov M.V. Sirotina A.P. Pershina E.A. Shibalova A.A. Mumlyakov A.M. Porokhov N.V. Tarkhov M.A.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 7
  • 4274
  • Pages: 69-73

Study of composite structure based on Ag and SiNWs

Quantum wires, quantum dots, and other low-dimensional systems
Bolshakov V.O. Ermina A.A. Prigoda K.V. Maximov M.Yu. Tolmachev V.A. Zharova Yu.A.
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 23
  • 4530
  • Pages: 128-134

Decorative protective coatings produced by atomic layer deposition and calculation of their spectral characteristics

Physical optics
Aksenova V.V. Mesh M.V. Kolokolov D.S. Kartseva T.Yu. Fedorov N.A. Pavluchenko A.S.
  • Year: 2023
  • Volume: 16
  • Issue: 1.2
  • 22
  • 4589
  • Pages: 165-171

Wettability of transparent conductive nanostructured ITO and ITO/Al2O3 coatings

Atom physics and physics of clusters and nanostructures
Aksenova V.V. Smirnova I.P. Markov L.K. Pavluchenko A.S. Kolokolov D.S. Volkov D.Yu.
  • Year: 2023
  • Volume: 16
  • Issue: 1.1
  • 28
  • 4929
  • Pages: 404-410

Plasma deposited indium phosphide and its electrophysical properties

Physical electronics
Maksimova A.A. Uvarov A.V. Kirilenko D.A. Baranov A.I. Vyacheslavova E.A. Gudovskikh A.S.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 42
  • 5989
  • Pages: 123-127