Articles by keywords "CVD"
Boron phosphide grown by PECVD and its optical properties
- Year: 2023
- Volume: 16
- Issue: 3.2
- 7
- 486
- Pages: 273-277
Study of the effect of dynamic and temperature inhomogeneities on epitaxial processes in a horizontal CVD reactor
- Year: 2023
- Volume: 16
- Issue: 1.1
- 10
- 1206
- Pages: 336-340