SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorViktor A. Ignatenko
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    Viktor A. Ignatenko
    Viktor A. Ignatenko
    Affiliation
    Peter the Great St. Petersburg Polytechnic University
    St. Petersburg, Russian Federation

    Study of the effect of dynamic and temperature inhomogeneities on epitaxial processes in a horizontal CVD reactor

    Simulation of physical processes
    Ignatenko V.A.Smirnovsky A. A.
    • Year: 2023
    • Volume: 16
    • Issue: 1.1
    • 19
    • 5248
    • Pages: 336-340