SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal - Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "A3B5"

Study of FIB-modified silicon areas by AFM and Raman spectroscopy

Condensed matter physics
Nikitina L.S. Lakhina E.A. Eremenko M.M. Balakirev S.V. Chernenko N.E. Shandyba N.A. Solodovnik M.S. Ageev O.A.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 12
  • 946
  • Pages: 59-63