SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorEvgeny Yu. Gusev
    Submit Your Paper
    Latest issues
    Evgeny Yu. Gusev
    Evgeny Yu. Gusev
    Publications
    Orcid ID
    0000-0001-8635-2573

    Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes

    Simulation of physical processes
    Malokhatko S.V.Gusev E.Yu.Jiang L.Ageev O.A.
    • Year: 2024
    • Volume: 17
    • Issue: 3.2
    • 12
    • 3540
    • Pages: 121-124

    All-silicon elements of terahertz photonics obtained by plasma etching

    Physical electronics
    Klimin V.S.Gusev E.Yu.Polyakov V.V.Tarasov P.A.Grigoryev M.N.Wang ShumengWang ZhaoweiJiang LiyuanZhang WeiAgeev O.A.
    • Year: 2025
    • Volume: 18
    • Issue: 3.1
    • 6
    • 1246
    • Pages: 165-168