SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorSofya V. Malokhatko
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    Sofya V. Malokhatko
    Sofya V. Malokhatko
    Publications
    Orcid ID
    0000-0001-7989-6513

    Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes

    Simulation of physical processes
    Malokhatko S.V.Gusev E.Yu.Jiang L.Ageev O.A.
    • Year: 2024
    • Volume: 17
    • Issue: 3.2
    • 12
    • 3764
    • Pages: 121-124