SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorLiyuan Jiang
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    Liyuan Jiang
    Liyuan Jiang

    All-silicon elements of terahertz photonics obtained by plasma etching

    Physical electronics
    Klimin V.S.Gusev E.Yu.Polyakov V.V.Tarasov P.A.Grigoryev M.N.Wang ShumengWang ZhaoweiJiang LiyuanZhang WeiAgeev O.A.
    • Year: 2025
    • Volume: 18
    • Issue: 3.1
    • 3
    • 687
    • Pages: 165-168