SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Evgeny Yu. Gusev
Submit Your Paper
Latest issues
Evgeny Yu. Gusev
Evgeny Yu. Gusev
Publications
Orcid ID
0000-0001-8635-2573

Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes

Simulation of physical processes
Malokhatko S.V. Gusev E.Yu. Jiang L. Ageev O.A.
  • Year: 2024
  • Volume: 17
  • Issue: 3.2
  • 9
  • 2067
  • Pages: 121-124