SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Evgeny Yu. Gusev
Submit Your Paper
Latest issues
Evgeny Yu. Gusev
Evgeny Yu. Gusev
Publications
Orcid ID
0000-0001-8635-2573

Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes

Simulation of physical processes
Malokhatko S.V. Gusev E.Yu. Jiang L. Ageev O.A.
  • Year: 2024
  • Volume: 17
  • Issue: 3.2
  • 11
  • 2434
  • Pages: 121-124

All-silicon elements of terahertz photonics obtained by plasma etching

Physical electronics
Klimin V.S. Gusev E.Yu. Polyakov V.V. Tarasov P.A. Grigoryev M.N. Wang Shumeng Wang Zhaowei Jiang Liyuan Zhang Wei Ageev O.A.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 0
  • 146
  • Pages: 165-168