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Julia Yu. Jityaeva
Affiliation
Southern Federal University
Taganrog, Russian Federation
Effect of plasma-chemical treatment of Si (001) substrates on the subsequent epitaxial growth of GaAs
- Year: 2023
- Volume: 16
- Issue: 3.1
- 21
- 3684
- Pages: 122-127
Combined approach of patterning on SiO2/Si substrate using ion beam and chemical wet etching
- Year: 2024
- Volume: 17
- Issue: 3.1
- 13
- 2170
- Pages: 75-78