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SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Author
Shibalova Anastasia A.
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Shibalova Anastasia A.
Affiliation
Institute of Nanotechnologies of Microelectronics of the RAS
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Moscow, Russian Federation
Properties of ultrathin epitaxial NbNx film on C-cut sapphire
Condensed matter physics
Shibalov M.V.
Sirotina A.P.
Pershina E.A.
Shibalova A.A.
Mumlyakov A.M.
Porokhov N.V.
Tarkhov M.A.
Year: 2023
Volume: 16
Issue: 3.1
1
1534
Pages: 69-73
Study of n-diamond and carbon nanowalls structure synthsized by the RF-PECVD
Physical materials technology
Mumlyakov A.M.
Pershina E.A.
Shibalova A.A.
Shibalov M.V.
Anufriev Yu.V.
Filippov I.A.
Sen’ V.
Tarkhov M.A.
Year: 2023
Volume: 16
Issue: 3.2
6
1450
Pages: 211-216