SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "atomic-layer deposition"

Physical deposition of atomic layers and growth of extremely thin films: four-decade series of the refractory metal-silicon system studies

Physical materials technology
Plyusnin N.I.
  • Year: 2025
  • Volume: 18
  • Issue: 4.1
  • 0
  • 77
  • Pages: 128-132

Study of photoconvertion heterojunction n-GaP/p-Si obtained by PE-ALD

Heterostructures, superlattices, quantum wells
Kiianitsyn S.Yu. Baranov A.I. Uvarov A.V. Maksimova A.A. Vyacheslavova E.A. Gudovskikh A.S.
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 19
  • 4244
  • Pages: 90-95