Articles by keywords "MEMS"
A compact MEMS switch based on a cantilever with three elastic elements
- Year: 2025
- Volume: 18
- Issue: 3.2
- 7
- 1215
- Pages: 168-171
Long-term temperature resistance stability of gold-based multilayer electrodes for gas sensors
- Year: 2025
- Volume: 18
- Issue: 3.2
- 4
- 1199
- Pages: 155-158
MEMS switch with an intermediate electrode for high-speed communication networks
- Year: 2025
- Volume: 18
- Issue: 3.1
- 8
- 1354
- Pages: 178-181
Combined resistive-capacitive MEMS switch for advanced communication systems
- Year: 2024
- Volume: 17
- Issue: 3.1
- 15
- 3679
- Pages: 186-190
A compact MEMS switch for advanced radar systems
- Year: 2024
- Volume: 17
- Issue: 3.1
- 14
- 3734
- Pages: 178-181
Modeling of a capacitive MEMS switch with “floating” electrode
- Year: 2023
- Volume: 16
- Issue: 3.1
- 30
- 5271
- Pages: 454-458
A cantilever type MEMS switch with enhanced contact force: the first results
- Year: 2023
- Volume: 16
- Issue: 3.1
- 23
- 5138
- Pages: 428-433
Testing the fast electrochemical micropump with PDMS membrane
- Year: 2023
- Volume: 16
- Issue: 3.1
- 8
- 4855
- Pages: 423-427
A seesaw-type MEMS switch with Pt and Ru contacts
- Year: 2022
- Volume: 15
- Issue: 3.3
- 20
- 5815
- Pages: 335-339
Low-induction integral heater for temperature control of MEMS vapor cell
- Year: 2022
- Volume: 15
- Issue: 3.3
- 33
- 6222
- Pages: 147-150
Performance optimization of the cantilever-based MEMS switch
- Year: 2022
- Volume: 15
- Issue: 3.2
- 34
- 6207
- Pages: 140-144
Microfabricated cells for chip-scale atomic clock based on coherent population trapping: fabrication and investigation
- Year: 2015
- Issue: 1
- 521
- 11056
- Pages: 61-68