Low-induction integral heater for temperature control of MEMS vapor cell

Physical electronics

This paper describes a solution to the problem of temperature control and the occurrence of a magnetic field created by a resistive heater in a gas cell of an atomic clock. A low-induction integral heater was developed in the form of a two-layer metallization system that mutually compensates for each other's magnetic fields. Numerical simulation was carried out, based on the results of which a prototype of a low-induction integral heater was developed using precision photolithography and technologies for applying thin-film conductive and dielectric coatings. Static and dynamic tests of the fabricated integral heater were carried out.