Articles by keywords "MEMS"
Combined resistive-capacitive MEMS switch for advanced communication systems
- Year: 2024
- Volume: 17
- Issue: 3.1
- 11
- 2209
- Pages: 186-190
A compact MEMS switch for advanced radar systems
- Year: 2024
- Volume: 17
- Issue: 3.1
- 11
- 2194
- Pages: 178-181
Modeling of a capacitive MEMS switch with “floating” electrode
- Year: 2023
- Volume: 16
- Issue: 3.1
- 25
- 3719
- Pages: 454-458
A cantilever type MEMS switch with enhanced contact force: the first results
- Year: 2023
- Volume: 16
- Issue: 3.1
- 22
- 3668
- Pages: 428-433
Testing the fast electrochemical micropump with PDMS membrane
- Year: 2023
- Volume: 16
- Issue: 3.1
- 4
- 3366
- Pages: 423-427
A seesaw-type MEMS switch with Pt and Ru contacts
- Year: 2022
- Volume: 15
- Issue: 3.3
- 19
- 4409
- Pages: 335-339
Low-induction integral heater for temperature control of MEMS vapor cell
- Year: 2022
- Volume: 15
- Issue: 3.3
- 30
- 4782
- Pages: 147-150
Performance optimization of the cantilever-based MEMS switch
- Year: 2022
- Volume: 15
- Issue: 3.2
- 33
- 4784
- Pages: 140-144
Microfabricated cells for chip-scale atomic clock based on coherent population trapping: fabrication and investigation
- Year: 2015
- Issue: 1
- 520
- 9605
- Pages: 61-68