SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "MEMS"

Modeling of a capacitive MEMS switch with “floating” electrode

Physical electronics
Morozov M.O. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1554
  • Pages: 454-458

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1425
  • Pages: 428-433

Testing the fast electrochemical micropump with PDMS membrane

Physical electronics
Shlepakov P.S. Uvarov I.V. Abramychev A.A. Svetovoy V.B.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 1293
  • Pages: 423-427

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
Uvarov I.V. Naumov V.V. Kupriyanov A.N. Izyumov M.O. Amirov I.I.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 17
  • 2395
  • Pages: 335-339

Low-induction integral heater for temperature control of MEMS vapor cell

Physical electronics
Kenesbay R. Enns Ya.B. Kazakin A.N. Kleimanov R. Akulshin Yu.D.
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 22
  • 2518
  • Pages: 147-150

Performance optimization of the cantilever-based MEMS switch

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 28
  • 2545
  • Pages: 140-144

Microfabricated cells for chip-scale atomic clock based on coherent population trapping: fabrication and investigation

Experimental technique and devices
Ermak S.V. Semenov V.V. Piatyshev E.N. Kazakin A.N. Komarevtcev I.M. Velichko E.N. Davydov V.V. Petrenko M.V.
  • Year: 2015
  • Issue: 1
  • 519
  • 7369
  • Pages: 61-68