Articles by keywords "MEMS"

A compact MEMS switch based on a cantilever with three elastic elements

Physical electronics
  • Year: 2025
  • Volume: 18
  • Issue: 3.2
  • 0
  • 107
  • Pages: 168-171

Long-term temperature resistance stability of gold-based multilayer electrodes for gas sensors

Physical electronics
  • Year: 2025
  • Volume: 18
  • Issue: 3.2
  • 0
  • 100
  • Pages: 155-158

MEMS switch with an intermediate electrode for high-speed communication networks

Physical electronics
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 0
  • 159
  • Pages: 178-181

Combined resistive-capacitive MEMS switch for advanced communication systems

Physical electronics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 12
  • 2581
  • Pages: 186-190

A compact MEMS switch for advanced radar systems

Physical electronics
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 11
  • 2623
  • Pages: 178-181

Modeling of a capacitive MEMS switch with “floating” electrode

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 27
  • 4125
  • Pages: 454-458

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 22
  • 4034
  • Pages: 428-433

Testing the fast electrochemical micropump with PDMS membrane

Physical electronics
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 4
  • 3765
  • Pages: 423-427

A seesaw-type MEMS switch with Pt and Ru contacts

Radiophysics
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 19
  • 4753
  • Pages: 335-339

Low-induction integral heater for temperature control of MEMS vapor cell

Physical electronics
  • Year: 2022
  • Volume: 15
  • Issue: 3.3
  • 30
  • 5190
  • Pages: 147-150

Performance optimization of the cantilever-based MEMS switch

Physical electronics
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 33
  • 5131
  • Pages: 140-144

Microfabricated cells for chip-scale atomic clock based on coherent population trapping: fabrication and investigation

Experimental technique and devices
  • Year: 2015
  • Issue: 1
  • 521
  • 9984
  • Pages: 61-68