SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorOleg A. Kelner
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    Oleg A. Kelner
    Oleg A. Kelner
    Affiliation
    St. Petersburg Electrotechnical University "LETI"
    St. Petersburg, Russian Federation

    Curvature and bow of III-N HEMT structures during epitaxy on silicon substrates

    Structure growth, surface, and interfaces
    Kelner O.A.Tsatsulnikov A.F.Nikolaev A.E.Zavarin E.E.
    • Year: 2023
    • Volume: 16
    • Issue: 1.3
    • 39
    • 5663
    • Pages: 50-54