SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorOleg A. Kelner
    Submit Your Paper
    Latest issues
    Oleg A. Kelner
    Oleg A. Kelner
    Affiliation
    St. Petersburg Electrotechnical University "LETI"
    St. Petersburg, Russian Federation

    Curvature and bow of III-N HEMT structures during epitaxy on silicon substrates

    Structure growth, surface, and interfaces
    Kelner O.A.Tsatsulnikov A.F.Nikolaev A.E.Zavarin E.E.
    • Year: 2023
    • Volume: 16
    • Issue: 1.3
    • 34
    • 4869
    • Pages: 50-54