SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Oleg A. Kelner
Submit Your Paper
Latest issues
Oleg A. Kelner
Oleg A. Kelner
Affiliation
St. Petersburg Electrotechnical University "LETI"
St. Petersburg, Russian Federation

Curvature and bow of III-N HEMT structures during epitaxy on silicon substrates

Structure growth, surface, and interfaces
Kelner O.A. Tsatsulnikov A.F. Nikolaev A.E. Zavarin E.E.
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 30
  • 3886
  • Pages: 50-54