SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Kelner Oleg A.
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Kelner Oleg A.
  • Affiliation
    St. Petersburg Electrotechnical University "LETI"
  • St. Petersburg, Russian Federation

Curvature and bow of III-N HEMT structures during epitaxy on silicon substrates

Structure growth, surface, and interfaces
Kelner O.A. Tsatsulnikov A.F. Nikolaev A.E. Zavarin E.E.
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 22
  • 1983
  • Pages: 50-54