SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
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Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Author
Kelner Oleg A.
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Kelner Oleg A.
Affiliation
St. Petersburg Electrotechnical University "LETI"
olegkelner08@gmail.com
St. Petersburg, Russian Federation
Curvature and bow of III-N HEMT structures during epitaxy on silicon substrates
Structure growth, surface, and interfaces
Kelner O.A.
Tsatsulnikov A.F.
Nikolaev A.E.
Zavarin E.E.
Year: 2023
Volume: 16
Issue: 1.3
27
2650
Pages: 50-54
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