SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Smirnov Alexander N.
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Smirnov Alexander N.
  • Affiliation
    Ioffe Institute
  • St. Petersburg, Russian Federation

Transfer of 3C-SiC heteroepitaxial layers grown on silicon to a 6H-SiC substrate by direct bonding technique

Structure growth, surface, and interfaces
Amelchuk D.G. Mynbaeva M.G. Smirnov A.N. Davydov V.Yu. Lebedev S.P. Lebedev A.A.
  • Year: 2023
  • Volume: 16
  • Issue: 1.3
  • 28
  • 2139
  • Pages: 39-43