SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Belozerov Igor A.
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Latest issues
Belozerov Igor A.

Performance optimization of the cantilever-based MEMS switch

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2022
  • Volume: 15
  • Issue: 3.2
  • 28
  • 2565
  • Pages: 140-144

A cantilever type MEMS switch with enhanced contact force: the first results

Physical electronics
Belozerov I.A. Uvarov I.V.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 15
  • 1450
  • Pages: 428-433