MEMS switch with an intermediate electrode for high-speed communication networks

MEMS switches are considered as a promising element base of microwave electronics, but their performance has not reached the required level yet. The ratio of capacitances in the closed and open states does not exceed 10 and has to be increased. A possible method is to apply an intermediate electrode over the dielectric coating of a transmission line. In this
work, a MEMS switch with an intermediate electrode is proposed for use in 5G communication networks.