SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "plasma etching"

All-silicon elements of terahertz photonics obtained by plasma etching

Physical electronics
Klimin V.S. Gusev E.Yu. Polyakov V.V. Tarasov P.A. Grigoryev M.N. Wang Shumeng Wang Zhaowei Jiang Liyuan Zhang Wei Ageev O.A.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 0
  • 37
  • Pages: 165-168

Metamaterials formed on the surface of silicon carbide by plasma treatment

Physical electronics
Klimin V.S. Demyanenko A.V. Bobkov I.N.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 0
  • 37
  • Pages: 161-164

Creation of optical isolated GaP(NAs) microcavities on silicon

Condensed matter physics
Dvoretckaia L.N. Mozharov A.M. Komarov S.D. Vyacheslavova E.A. Moiseev E.I. Fedorov V.V. Mukhin I.S.
  • Year: 2024
  • Volume: 17
  • Issue: 3
  • 32
  • 3305
  • Pages: 25-35