Articles by keywords "plasma enhanced chemical vapor deposition"
Boron phosphide grown by PECVD and its optical properties
- Year: 2023
- Volume: 16
- Issue: 3.2
- 7
- 486
- Pages: 273-277
Plasma deposited indium phosphide and its electrophysical properties
- Year: 2022
- Volume: 15
- Issue: 3.3
- 19
- 1935
- Pages: 123-127