SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
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    Articles by keywords "plasma enhanced chemical vapor deposition"

    Admittance spectroscopy of boron phosphide heterostructures grown by plasma enhanced chemical vapor deposition on silicon substrates

    Condensed matter physics
    Baranov A.I.Vtorygin G.E.Uvarov A.V.Maksimova A.A.Vyacheslavova E.A.Gudovskikh A.S.
    • Year: 2024
    • Volume: 17
    • Issue: 3
    • 27
    • 4349
    • Pages: 17-24

    Boron phosphide grown by PECVD and its optical properties

    Physical materials technology
    Maksimova A.A.Uvarov A.V.Pozdeev V.A.Kirilenko D.A.Baranov A.I.Vyacheslavova E.A.Gudovskikh A.S.
    • Year: 2023
    • Volume: 16
    • Issue: 3.2
    • 37
    • 5561
    • Pages: 273-277

    Plasma deposited indium phosphide and its electrophysical properties

    Physical electronics
    Maksimova A.A.Uvarov A.V.Kirilenko D.A.Baranov A.I.Vyacheslavova E.A.Gudovskikh A.S.
    • Year: 2022
    • Volume: 15
    • Issue: 3.3
    • 45
    • 7154
    • Pages: 123-127