SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "PECVD"

Influence of electrode geometry on growth of horizontally aligned carbon nanotubes

Simulation of physical processes
Khomlenko D.N. Il`in O.I. Il`ina M.V.
  • Year: 2025
  • Volume: 18
  • Issue: 3.2
  • 4
  • 393
  • Pages: 66-71

Boron phosphide grown by PECVD and its optical properties

Physical materials technology
Maksimova A.A. Uvarov A.V. Pozdeev V.A. Kirilenko D.A. Baranov A.I. Vyacheslavova E.A. Gudovskikh A.S.
  • Year: 2023
  • Volume: 16
  • Issue: 3.2
  • 35
  • 4532
  • Pages: 273-277