SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
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    Articles by keywords "PECVD"

    Influence of electrode geometry on growth of horizontally aligned carbon nanotubes

    Simulation of physical processes
    Khomlenko D.N.Il`in O.I.Il`ina M.V.
    • Year: 2025
    • Volume: 18
    • Issue: 3.2
    • 5
    • 703
    • Pages: 66-71

    Boron phosphide grown by PECVD and its optical properties

    Physical materials technology
    Maksimova A.A.Uvarov A.V.Pozdeev V.A.Kirilenko D.A.Baranov A.I.Vyacheslavova E.A.Gudovskikh A.S.
    • Year: 2023
    • Volume: 16
    • Issue: 3.2
    • 36
    • 4912
    • Pages: 273-277