SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Shumeng Wang
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Shumeng Wang
Shumeng Wang

All-silicon elements of terahertz photonics obtained by plasma etching

Physical electronics
Klimin V.S. Gusev E.Yu. Polyakov V.V. Tarasov P.A. Grigoryev M.N. Wang Shumeng Wang Zhaowei Jiang Liyuan Zhang Wei Ageev O.A.
  • Year: 2025
  • Volume: 18
  • Issue: 3.1
  • 0
  • 36
  • Pages: 165-168