SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Jiang Liyuan
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Jiang Liyuan

Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes

Simulation of physical processes
Malokhatko S.V. Gusev E.Yu. Jiang L. Ageev O.A.
  • Year: 2024
  • Volume: 17
  • Issue: 3.2
  • 0
  • 38
  • Pages: 121-124