SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
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Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Author
Jiang Liyuan
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Volume 17
Issue 3.2
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2024
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Volume 17
Issue 3.1
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Jiang Liyuan
jiangliyuan@sdlaser.cn
Effect of internal mechanical stresses in a multilayer structure on displacement for various designs of microelectromechanical membranes
Simulation of physical processes
Malokhatko S.V.
Gusev E.Yu.
Jiang L.
Ageev O.A.
Year: 2024
Volume: 17
Issue: 3.2
3
423
Pages: 121-124
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