SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorKsenia A. Fetisenkova
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    Ksenia A. Fetisenkova
    Ksenia A. Fetisenkova
    Publications
    Orcid ID
    0000-0003-3849-108X

    E-beam resist AR-N 7520 in the formation of the photonic structures

    Physical materials technology
    Fetisenkova K.A.Melnikov A.E.Miakonkikh A.V.Rogozhin A.E.Tatarintsev A.A.
    • Year: 2024
    • Volume: 17
    • Issue: 3.1
    • 19
    • 3381
    • Pages: 278-282