SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Ksenia A. Fetisenkova
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Ksenia A. Fetisenkova
Ksenia A. Fetisenkova
Publications
Orcid ID
0000-0003-3849-108X

E-beam resist AR-N 7520 in the formation of the photonic structures

Physical materials technology
Fetisenkova K.A. Melnikov A.E. Miakonkikh A.V. Rogozhin A.E. Tatarintsev A.A.
  • Year: 2024
  • Volume: 17
  • Issue: 3.1
  • 12
  • 2312
  • Pages: 278-282