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SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Pavlov Artem
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Pavlov Artem
Affiliation
Institute of High Current Electronics, Siberian Branch, RAS
decodeDefault
Tomsk, Russian Federation
Novel methods for synthesizing high-quality thin films through short and ultrashort high-power pulsed magnetron sputtering
Condensed matter physics
Kozhevnikov V.Yu.
Oskirko V.О.
Rabotkin S.V.
Pavlov A.P.
Semenov V.A.
Soloviev A.A.
Grenadyorov A.S.
Zakharov A.N.
Year: 2023
Volume: 16
Issue: 3.1
6
1442
Pages: 26-30