SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorSergey V. Rabotkin
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    Sergey V. Rabotkin
    Sergey V. Rabotkin
    Affiliation
    Institute of High Current Electronics, Siberian Branch, RAS
    Tomsk, Russian Federation

    Novel methods for synthesizing high-quality thin films through short and ultrashort high-power pulsed magnetron sputtering

    Condensed matter physics
    Kozhevnikov V.Yu.Oskirko V.О.Rabotkin S.V.Pavlov A.P.Semenov V.A.Soloviev A.A.Grenadyorov A.S.Zakharov A.N.
    • Year: 2023
    • Volume: 16
    • Issue: 3.1
    • 21
    • 4573
    • Pages: 26-30