SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Ignatenko Viktor A.
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Ignatenko Viktor A.
  • Affiliation
    Peter the Great St. Petersburg Polytechnic University
  • St. Petersburg, Russian Federation

Study of the effect of dynamic and temperature inhomogeneities on epitaxial processes in a horizontal CVD reactor

Simulation of physical processes
Ignatenko V.A. Smirnovsky A. A.
  • Year: 2023
  • Volume: 16
  • Issue: 1.1
  • 11
  • 1996
  • Pages: 336-340