SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Viktor A. Ignatenko
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Viktor A. Ignatenko
Viktor A. Ignatenko
Affiliation
Peter the Great St. Petersburg Polytechnic University
St. Petersburg, Russian Federation

Study of the effect of dynamic and temperature inhomogeneities on epitaxial processes in a horizontal CVD reactor

Simulation of physical processes
Ignatenko V.A. Smirnovsky A. A.
  • Year: 2023
  • Volume: 16
  • Issue: 1.1
  • 19
  • 4406
  • Pages: 336-340