SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorPetr Yu. Grigoriev
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    Petr Yu. Grigoriev
    Petr Yu. Grigoriev

    Simulation of sputtering of the silicon carbide surface under bombardment by ions and clusters

    Simulation of physical processes
    Grigoriev P.Yu.Zhurkin E.E.
    • Year: 2011
    • Issue: 2
    • 0
    • 9856
    • Pages: 67-74