SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics
Peter the Great St. Petersburg Polytechnic University
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Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Author
Grigoriev Petr Yu.
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Grigoriev Petr Yu.
grigorievpit@gmail.com
Simulation of sputtering of the silicon carbide surface under bombardment by ions and clusters
Simulation of physical processes
Grigoriev P.Yu.
Zhurkin E.E.
Year: 2011
Issue: 2
0
6673
Pages: 67-74
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