SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Grigoriev Petr Yu.
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Grigoriev Petr Yu.

Simulation of sputtering of the silicon carbide surface under bombardment by ions and clusters

Simulation of physical processes
Grigoriev P.Yu. Zhurkin E.E.
  • Year: 2011
  • Issue: 2
  • 0
  • 6217
  • Pages: 67-74