SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
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Author Taisia T. Korchagina
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Taisia T. Korchagina
Taisia T. Korchagina

A formation method of amorphous and crystalline silicon nanoclusters in dielectric films

Atom physics and physics of clusters and nanostructures
Korchagina T.T. Volodin V.A.
  • Year: 2010
  • Issue: 1
  • 0
  • 8831
  • Pages: 66-71