Articles by keywords "silicon nitride"
Investigation of nanosized structures using internal friction effect
- Year: 2024
- Volume: 17
- Issue: 1.1
- 15
- 1671
- Pages: 37-42
Dependence of light-addressable potentiometric sensor sensitivity on photo-induced processes in Si
- Year: 2022
- Volume: 15
- Issue: 3.2
- 18
- 3053
- Pages: 135-139
A formation method of amorphous and crystalline silicon nanoclusters in dielectric films
- Year: 2010
- Issue: 1
- 0
- 6904
- Pages: 66-71