SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
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Articles by keywords "capacitance-voltage profiling"

Capacitance-voltage characterization of BP layers grown by PECVD mode

Physical electronics
Vtorygin G.E. Baranov A.I. Uvarov A.V. Maksimova A.A. Vyacheslavova E.A.
  • Year: 2023
  • Volume: 16
  • Issue: 3.1
  • 13
  • 873
  • Pages: 473-478