SPbPU Journal - Physics and Mathematics
    St. Petersburg Polytechnic University Journal: Physics and MathematicsPeter the Great St. Petersburg Polytechnic University
    Since 2008
    ISSN 2304-9782
    ISSN 2618-8686
    ISSN 2405-7223
    enАнглийский
    Version for the visually impaired
    AuthorBoris M. Voronov
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    Boris M. Voronov
    Boris M. Voronov

    Study of low temperature reactive magnetron sputtering NbN films for fabrication of an ultra-high sensitive detector

    Experimental technique and devices
    Ivashentseva I.V.Kaurova N.S.Voronov B.M.Goltsman G.N.Tretyakov I.V.
    • Year: 2025
    • Volume: 18
    • Issue: 3.2
    • 9
    • 1531
    • Pages: 129-133