SPbPU Journal - Physics and Mathematics
St. Petersburg Polytechnic University Journal: Physics and Mathematics Peter the Great St. Petersburg Polytechnic University
Since 2008
ISSN 2304-9782
ISSN 2618-8686
ISSN 2405-7223
en Английский
Version for the visually impaired
Author Boris M. Voronov
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Boris M. Voronov
Boris M. Voronov

Study of low temperature reactive magnetron sputtering NbN films for fabrication of an ultra-high sensitive detector

Experimental technique and devices
Ivashentseva I.V. Kaurova N.S. Voronov B.M. Goltsman G.N. Tretyakov I.V.
  • Year: 2025
  • Volume: 18
  • Issue: 3.2
  • 0
  • 17
  • Pages: 129-133