A compact MEMS switch based on a cantilever with three elastic elements

MEMS switches are of significant interest for advanced radioelectronic systems. High RF performance combined with small size and low power consumption make them promising for use in phased array antennas, wireless communication devices and navigation systems. This paper presents a resistive switch based on a cantilever with three elastic elements. The pull-in voltage and contact resistance are measured, and the results are compared with the calculated values. The switch provides lower resistance than previous devices.