Interdigital gold electrodes for a conductometric gas sensor on the glass surface

Modern cities with developed industries suffer from a large amount of emissions into the atmosphere. Therefore, for modern scientists, the task of creating sensors for environmental pollutants is urgent. This paper considers one of the tasks of creating a gas-sensitive element of a conductometric sensor for greenhouse gases in the atmosphere. An important component of a gas-sensitive element is a carrier substrate with a branched system of electrodes. The electrode system must be stable and have chemical, thermal, and mechanical resistance. The paper develops a technique for creating a system of gold electrodes for a gas-sensitive element on the surface of a glass substrate. The increasing mechanical strength of electrodes is considered. In general, the mechanical strength of thin films depends on the intralayer, interlayer bonding of components and adhesion to the carrier substrate. In this work, it is sufficient to use one numerical parameter, which characterizes the mechanical resistance of the layer as a whole. The method of determining nano hardness was used to control the mechanical strength of the electrodes. Nanohardness was measured by atomic force microscopy probe lithography.