Pressure sensing with ZnO structures in PDMS matrix via impedance spectroscopy

Condensed matter physics
Authors:
Nikolaeva Aleksandra V.. Kondratev Valeriy M. Kadinskaya Svetlana A. Markina Diana Е. Kochetkov Fedor M. Zubov Fedor I. Monastyrenko Anatoliy O. Bolshakov Alexey D.
Abstract:

The work is devoted to fabrication of the mechanical pressure sensors based on zinc oxide microwires (ZnO MWs) synthesized via low-temperature hydrothermal method. The ZnO MWs were encapsulated in Poly(dimethylsiloxane) (PDMS) membrane by G-coating technique between two ceramic substrates with interdigital gold contacts. The correlation between the mechanical load applied to the sensor and its electrophysical characteristics is studied with electrical impedance spectroscopy. The results of the work are of interest for the development of pressure sensors, in particular for miniature portable flexible health monitoring systems.